Effects of Ion Temperature on Collisional DC Sheath in Plasma Ion Implantation
نویسندگان
چکیده
The collision frequency should definitely be taken into account in high pressure discharges. In this work by using forth order of Rung Kuta method, and two-fluid model, temperature dependence of the characteristics of a collisional DC plasma sheath, such as electric field, electric potential, ion and electron number density, and ion velocity, has been studied. It will be shown in the constant cathode electric potential, the more the ion temperature, the low the thickness of sheath.
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